Magnetic multilayer fabrication technology with selective activation of SU-8 films
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Published Version
Date
2016-11
Authors
Anthony, Ricky
Ó Mathúna, S. Cian
Rohan, James F.
Journal Title
Journal ISSN
Volume Title
Publisher
IOP Publishing
Published Version
Abstract
Developing magnetic multilayers are essential for reducing the core eddy current losses in the integrated power magnetic components (inductors/transformers). PVD based processes are typically used to achieve the multilayers with thin dielectric spacers. However, those processes are costly, and can be difficult to integrate. It is evident that cost effective alternative is needed. In recent years, electrochemical processes have been investigated to address these issues. One such method would be to successive metallization of insulating photoresists acting as spacer layer (such as SU-8) with soft magnetic films (such as Ni-Fe-Co alloys). This paper describes an experimental procedure to fabricate magnetic multilayers with a thin variant of SU-8 2 (< 1.5 µm) as inter-layers for integrated micro-inductors/transformers for power conversion applications.
Description
Keywords
Power conversion circuitry , Magnetic multilayers , Micro-inductors , Micro transformers , Power conversion applications.
Citation
Anthony, R., Ó Mathúna, C. & Rohan, J. F. (2016) ‘Magnetic Multilayer Fabrication Technology with Selective Activation of SU-8 Films’, Journal of Physics: Conference Series, 757, 012031. doi: 10.1088/1742-6596/757/1/012031