Reconstructing the model of a nonlinear MEMS structure by the example of a piezoelectric resonant energy harvester

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Blokhina, Elena
O'Riordan, Eoghan
Olszewski, Oskar Zbigniew
Houlihan, Ruth
Mathewson, Alan
Bizzarri, Federico
Brambilla, Angelo
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Institute of Electrical and Electronics Engineers (IEEE)
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Microelectromechanical systems contain mechanical elements coupled with conditioning electronics that control and process the signal generated by the mechanical component. These systems are miniature and can be easily integrated on one chip, which explains the enormous popularity of MEMS. The applications of MEMS began with environmental sensors and have grown to encompass RF and optical applications along with energy harvesting. Because of their mixed-domain nature, the design of conditioning electronics relies on accurate models of the mechanical component. As an additional requirement, the model must be simple enough and be compatible with common circuit simulation tools. The latter requirement may be particularly difficult to achieve due to the fact that most of modern MEMS structures are quite complex and often nonlinear. In this conference contribution, we describe the methodology of building a model of a nonlinear MEMS resonator using the conventional modelling approach and then using an improved model together with an optimisation technique on the basis of the circuit simulator PAN.
Crystal resonators , Energy harvesting , Micromechanical resonators , Microsensors , Piezoelectric transducers , Circuit simulator PAN , Nonlinear MEMS resonator , Mixed-domain nature , Optical applications , Environmental sensors , Conditioning electronics , Microelectromechanical systems , Piezoelectric resonant energy harvester , Mathematical model , Integrated circuit modeling , Micromechanical devices , Matlab , Force , Springs , Load modeling
Blokhina, E., O'Riordan, E., Olszewski, O.Z., Houlihan, R., Mathewson, A., Bizzarri, F. and Brambilla, A. (2018) 'Reconstructing the model of a nonlinear MEMS structure by the example of a piezoelectric resonant energy harvester', 2018 IEEE International Symposium on Circuits and Systems (ISCAS), Florence, Italy, 27-30 May. doi:10.1109/ISCAS.2018.8351130
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