A flexure motion stage system for light beam control
Riza, Mehdi N.
This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability.
Light beam , MEMS (micromirror arrays) , Micromirror arrays , Flexure motion
Riza, M. and Hao, G. (2019) 'A flexure motion stage system for light beam control', Microsystem Technologies, 25(8), pp. 3185-3191. doi: 10.1007/s00542-018-4168-8
© Springer-Verlag GmbH Germany, part of Springer Nature 2018. This is a post-peer-review, pre-copyedit version of an article published in Microsystem Technologies. The final authenticated version is available online at: http://dx.doi.org/10.1007/s00542-018-4168-8