A flexure motion stage system for light beam control
| dc.contributor.author | Riza, Mehdi N. | |
| dc.contributor.author | Hao, Guangbo | |
| dc.date.accessioned | 2021-04-13T12:55:34Z | |
| dc.date.available | 2021-04-13T12:55:34Z | |
| dc.date.issued | 2018-10-10 | |
| dc.date.updated | 2021-04-13T12:46:10Z | |
| dc.description.abstract | This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89° with a precision and repeatability of 0.0213°, demonstrating a micro-positioning ability. | en |
| dc.description.status | Peer reviewed | en |
| dc.description.version | Accepted Version | en |
| dc.format.mimetype | application/pdf | en |
| dc.identifier.citation | Riza, M. and Hao, G. (2019) 'A flexure motion stage system for light beam control', Microsystem Technologies, 25(8), pp. 3185-3191. doi: 10.1007/s00542-018-4168-8 | en |
| dc.identifier.doi | 10.1007/s00542-018-4168-8 | en |
| dc.identifier.endpage | 3191 | en |
| dc.identifier.issn | 0946-7076 | |
| dc.identifier.issued | 8 | en |
| dc.identifier.journaltitle | Microsystem Technologies | en |
| dc.identifier.startpage | 3185 | en |
| dc.identifier.uri | https://hdl.handle.net/10468/11197 | |
| dc.identifier.volume | 25 | en |
| dc.language.iso | en | en |
| dc.publisher | Springer | en |
| dc.relation.uri | https://link.springer.com/article/10.1007%2Fs00542-018-4168-8 | |
| dc.rights | © Springer-Verlag GmbH Germany, part of Springer Nature 2018. This is a post-peer-review, pre-copyedit version of an article published in Microsystem Technologies. The final authenticated version is available online at: http://dx.doi.org/10.1007/s00542-018-4168-8 | en |
| dc.subject | Light beam | en |
| dc.subject | MEMS (micromirror arrays) | en |
| dc.subject | Micromirror arrays | en |
| dc.subject | Flexure motion | en |
| dc.title | A flexure motion stage system for light beam control | en |
| dc.type | Article (peer-reviewed) | en |
