A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches
dc.contributor.author | Ryan, Cormac | |
dc.contributor.author | Olszewski, Oskar Zbigniew | |
dc.contributor.author | Houlihan, Ruth | |
dc.contributor.author | O'Mahony, Conor | |
dc.contributor.author | Duane, Russell | |
dc.contributor.funder | Science Foundation Ireland | |
dc.contributor.funder | European Space Agency | |
dc.contributor.funder | Irish Research Council for Science, Engineering and Technology | |
dc.date.accessioned | 2017-07-25T14:16:23Z | |
dc.date.available | 2017-07-25T14:16:23Z | |
dc.date.issued | 2014 | |
dc.description.abstract | A bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices. (C) 2014 AIP Publishing LLC. | en |
dc.description.sponsorship | Science Foundation Ireland (Grant No. SFI 10/RFP/ECE2883); European Space Agency and Irish Research Council for Science, Engineering and Technology (ESA-IRCSET NPI programme ) | en |
dc.description.status | Peer reviewed | en |
dc.description.version | Published Version | en |
dc.format.mimetype | application/pdf | en |
dc.identifier.articleid | 61908 | |
dc.identifier.citation | Ryan, C., Olszewski, Z., Houlihan, R., O'Mahony, C. and Duane, R. (2014) 'A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches', Applied Physics Letters, 104(6), pp. 061908. doi: 10.1063/1.4865584 | en |
dc.identifier.doi | 10.1063/1.4865584 | |
dc.identifier.endpage | 5 | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.issn | 1077-3118 | |
dc.identifier.issued | 6 | |
dc.identifier.journaltitle | Applied Physics Letters | en |
dc.identifier.startpage | 1 | |
dc.identifier.uri | https://hdl.handle.net/10468/4260 | |
dc.identifier.volume | 104 | |
dc.language.iso | en | en |
dc.publisher | AIP Publishing | en |
dc.relation.uri | http://aip.scitation.org/doi/abs/10.1063/1.4865584 | |
dc.rights | © 2014 AIP Publishing LLC.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Ryan, C., Olszewski, Z., Houlihan, R., O'Mahony, C. and Duane, R. (2014) 'A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches', Applied Physics Letters, 104(6), pp. 061908 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.4865584 | en |
dc.subject | Mems devices | en |
dc.subject | Stress-relaxation | en |
dc.subject | Thin-films | en |
dc.subject | Behavior | en |
dc.subject | Microelectromechanical systems | en |
dc.subject | Viscoelasticity | en |
dc.subject | Creep | en |
dc.subject | Thin film devices | en |
dc.subject | Dielectrics | en |
dc.title | A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches | en |
dc.type | Article (peer-reviewed) | en |
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