A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches

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dc.contributor.authorRyan, Cormac
dc.contributor.authorOlszewski, Oskar Zbigniew
dc.contributor.authorHoulihan, Ruth
dc.contributor.authorO'Mahony, Conor
dc.contributor.authorDuane, Russell
dc.contributor.funderScience Foundation Ireland
dc.contributor.funderEuropean Space Agency
dc.contributor.funderIrish Research Council for Science, Engineering and Technology
dc.date.accessioned2017-07-25T14:16:23Z
dc.date.available2017-07-25T14:16:23Z
dc.date.issued2014
dc.description.abstractA bipolar hold-down voltage was used to study mechanical degradation in radio-frequency microelectromechanical capacitive shunt switches. The bipolar signal was used to prevent the occurrence of dielectric charging and to isolate mechanical effects. The characteristics of material stress relaxation and recovery were monitored by recording the change of the pull-in voltage of a device. The creep effect in movable components was saturated by repeated actuation to the pulled-in position, while comparison with a theoretical model confirmed the presence of linear viscoelasticity in the devices. (C) 2014 AIP Publishing LLC.en
dc.description.sponsorshipScience Foundation Ireland (Grant No. SFI 10/RFP/ECE2883); European Space Agency and Irish Research Council for Science, Engineering and Technology (ESA-IRCSET NPI programme )en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid61908
dc.identifier.citationRyan, C., Olszewski, Z., Houlihan, R., O'Mahony, C. and Duane, R. (2014) 'A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches', Applied Physics Letters, 104(6), pp. 061908. doi: 10.1063/1.4865584en
dc.identifier.doi10.1063/1.4865584
dc.identifier.endpage5
dc.identifier.issn0003-6951
dc.identifier.issn1077-3118
dc.identifier.issued6
dc.identifier.journaltitleApplied Physics Lettersen
dc.identifier.startpage1
dc.identifier.urihttps://hdl.handle.net/10468/4260
dc.identifier.volume104
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.urihttp://aip.scitation.org/doi/abs/10.1063/1.4865584
dc.rights© 2014 AIP Publishing LLC.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Ryan, C., Olszewski, Z., Houlihan, R., O'Mahony, C. and Duane, R. (2014) 'A simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switches', Applied Physics Letters, 104(6), pp. 061908 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.4865584en
dc.subjectMems devicesen
dc.subjectStress-relaxationen
dc.subjectThin-filmsen
dc.subjectBehavioren
dc.subjectMicroelectromechanical systemsen
dc.subjectViscoelasticityen
dc.subjectCreepen
dc.subjectThin film devicesen
dc.subjectDielectricsen
dc.titleA simple electrical test method to isolate viscoelasticity and creep in capacitive microelectromechanical switchesen
dc.typeArticle (peer-reviewed)en
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