CMOS-Compatible titanium nitride for on-chip plasmonic Schottky photodetectors
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Published version
Date
2019-10-07
Authors
Gosciniak, Jacek
Atar, Fatih B.
Corbett, Brian
Rasras, Mahmoud
Journal Title
Journal ISSN
Volume Title
Publisher
American Chemical Society
Published Version
Abstract
Here, we propose a waveguide-integrated plasmonic Schottky photodetector (PD) operating based on an internal photoemission process with a titanium nitride plasmonic material. The theoretically examined structure employs an asymmetric metal–semiconductor–metal waveguide configuration with one of the electrodes being gold and the second being either gold, titanium, or titanium nitride. For the first time, we measured a Schottky barrier height of 0.67 eV for titanium nitride on p-doped silicon, which is very close to the optimal value of 0.697 eV. This barrier height will enable photodetection with a high signal-to-noise ratio when operating at a wavelength of 1550 nm. In addition to the measured optical properties of high absorption losses and reasonably large real part of the permittivity that are desired for this type of PD, titanium nitride is also compatible with easy integration on existing complementary metal–oxide–semiconductor technology. The use of titanium nitride results in a shorter penetration depth of the optical mode into the metal when compared to Ti, which in turn enhances the probability for transmission of hot electrons to the adjacent semiconductor, giving rise to an enhancement in responsivity.
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Keywords
CMOS , Titanium Nitride , Plasmonic , On-chip , Schottky photodetectors
Citation
Gosciniak, J., Atar, F. B., Corbett, B. and Rasras, M. (2019) 'CMOS-Compatible Titanium Nitride for On-Chip Plasmonic Schottky Photodetectors', ACS Omega, 4(17), pp. 17223-17229. doi: 10.1021/acsomega.9b01705