A silicon-based MEMS vibrating mesh nebulizer for inhaled drug delivery

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dc.contributor.authorOlszewski, Oskar Zbigniew
dc.contributor.authorMacLoughlin, Ronan
dc.contributor.authorBlake, Alan
dc.contributor.authorO'Neill, Mike
dc.contributor.authorMathewson, Alan
dc.contributor.authorJackson, Nathan
dc.contributor.funderCollaborative Centre for Applied Nanotechnologyen
dc.contributor.funderEnterprise Irelanden
dc.contributor.funderAnalog Devicesen
dc.contributor.funderAerogen Ltd, Ireland
dc.date.accessioned2017-02-10T10:33:19Z
dc.date.available2017-02-10T10:33:19Z
dc.date.issued2017-01-04
dc.date.updated2017-02-10T10:12:03Z
dc.description.abstractThis paper presents a silicon-based MEMS vibrating mesh nebulizer capable of producing micro droplets for inhaled drug delivery. The device concept, design, fabrication, and measurements are presented. The core element of the nebulizer (vibrating mesh) was fabricated using silicon process and consists of 1000 tapered micro-sized apertures. During operation the mesh vibrates at high frequency with the bending profile corresponding to the 02 resonance mode. The droplet diameter measured at the device output is 3.75 mu m and a typical output rate is 0.45 ml / min.en
dc.description.statusPeer revieweden
dc.description.urihttp://eurosensors.akcongress.com/en
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationOlszewski, O. Z., MacLoughlin, R., Blake, A., O’Neill, M., Mathewson, A. and Jackson, N. (2016) ‘A silicon-based MEMS vibrating mesh nebulizer for inhaled drug delivery’, Procedia Engineering, 168, pp. 1521-1524. doi:10.1016/j.proeng.2016.11.451en
dc.identifier.doi10.1016/j.proeng.2016.11.451
dc.identifier.endpage1524en
dc.identifier.issn1877-7058
dc.identifier.journaltitleProcedia Engineeringen
dc.identifier.startpage1521en
dc.identifier.urihttps://hdl.handle.net/10468/3616
dc.identifier.volume168en
dc.language.isoenen
dc.publisherElsevier Ltden
dc.relation.ispartofEurosensors 2016 - 30th Anniversary Eurosensors Conference
dc.rights© 2016, the Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)en
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/en
dc.subjectNebulizeren
dc.subjectMEMSen
dc.subjectSiliconen
dc.subjectPiezoelectricen
dc.subjectAerosolen
dc.subjectLiquid atomizationen
dc.titleA silicon-based MEMS vibrating mesh nebulizer for inhaled drug deliveryen
dc.typeConference itemen
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