Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

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Olszewski, Oskar Zbigniew
Houlihan, Ruth
Ryan, Cormac
O'Mahony, Conor
Duane, Russell
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DC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible. (C) 2012 American Institute of Physics. (http://dx.doi.org/10.1063/1.4726116)
Electrodes , Aluminium , Titanium , Dielectrics , Microelectromechanical systems
Olszewski, Z., Houlihan, R., Ryan, C., O’Mahony, C. and Duane, R. (2012) 'Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches', Applied Physics Letters, 100(23), pp. 233505. doi: 10.1063/1.4726116
© 2012 American Institute of Physics.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Viktorov, E. A., Erneux, T., Piwonski, T., Pulka, J., Huyet, G. and Houlihan, J. (2012) 'Pump dependence of the dynamics of quantum dot based waveguide absorbers', Applied Physics Letters, 100(24), pp. 241108 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.4729155