Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

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dc.contributor.authorOlszewski, Oskar Zbigniew
dc.contributor.authorHoulihan, Ruth
dc.contributor.authorRyan, Cormac
dc.contributor.authorO'Mahony, Conor
dc.contributor.authorDuane, Russell
dc.contributor.funderEuropean Space Agency
dc.contributor.funderIrish Research Council for Science, Engineering and Technology
dc.contributor.funderScience Foundation Ireland
dc.date.accessioned2017-07-28T10:48:28Z
dc.date.available2017-07-28T10:48:28Z
dc.date.issued2012
dc.description.abstractDC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible. (C) 2012 American Institute of Physics. (http://dx.doi.org/10.1063/1.4726116)en
dc.description.sponsorshipEuropean Space Agency and Irish Research Council for Science, Engineering and Technology (through the Networking and Partnership Initiative (NPI)); Science Foundation Ireland (SFI 10/RFP/ECE2883))en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid233505
dc.identifier.citationOlszewski, Z., Houlihan, R., Ryan, C., O’Mahony, C. and Duane, R. (2012) 'Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches', Applied Physics Letters, 100(23), pp. 233505. doi: 10.1063/1.4726116en
dc.identifier.doi10.1063/1.4726116
dc.identifier.endpage4
dc.identifier.issn0003-6951
dc.identifier.issn1077-3118
dc.identifier.issued23
dc.identifier.journaltitleApplied Physics Lettersen
dc.identifier.startpage1
dc.identifier.urihttps://hdl.handle.net/10468/4299
dc.identifier.volume100
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.urihttp://aip.scitation.org/doi/abs/10.1063/1.4726116
dc.rights© 2012 American Institute of Physics.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Viktorov, E. A., Erneux, T., Piwonski, T., Pulka, J., Huyet, G. and Houlihan, J. (2012) 'Pump dependence of the dynamics of quantum dot based waveguide absorbers', Applied Physics Letters, 100(24), pp. 241108 and may be found at http://aip.scitation.org/doi/abs/10.1063/1.4729155en
dc.subjectElectrodesen
dc.subjectAluminiumen
dc.subjectTitaniumen
dc.subjectDielectricsen
dc.subjectMicroelectromechanical systemsen
dc.titleExperimental isolation of degradation mechanisms in capacitive microelectromechanical switchesen
dc.typeArticle (peer-reviewed)en
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