Miniaturised multi-MEMS sensor development
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Accepted Version
Date
2008
Authors
Hautefeuille, Mathieu
O'Mahony, Conor
O'Flynn, Brendan
Peters, Frank H.
Journal Title
Journal ISSN
Volume Title
Publisher
IEEE
Published Version
Abstract
Complex systems, from environmental behaviour to electronics reliability, can now be
monitored with Wireless Sensor Networks (WSN), where multiple environmental sensors are deployed
in remote locations. This ensures aggregation and reading of data, at lower cost and lower power
consumption. Because miniaturisation of the sensing system is hampered by the fact that discrete
sensors and electronics consume board area, the development of MEMS sensors offers a promising
solution. At Tyndall, the fabrication flow of multiple sensors has been made compatible with CMOS
circuitry to further reduce size and cost. An ideal platform on which to host these MEMS
environmental sensors is the Tyndall modular wireless mote. This paper describes the development
and test of the latest sensors incorporating temperature, humidity, corrosion, and gas. It
demonstrates their deployment on the Tyndall platform, allowing real-time readings, data
aggregation and cross-correlation capabilities. It also presents the design of the next generation
sensing platform using the novel 10mm wireless cube developed by Tyndall.
Description
Keywords
Microelectromechanical devices , Environmental management systems , Micromachining
Citation
Hautefeuille, M., O'Mahony, C., O'Flynn, B., Peters, F.H., 2008. Miniaturised multi-MEMS sensor development. In: IMAPS (International Microelectronics And Packaging Society)-CPMT(Components, Packaging and Manufacturing Technology) 32nd International Microelectronics and Packaging IMAPS-CPMT Poland Conference. Warszawa-Pułtusk, Poland 21-24 September 2008.
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