Tuning MEMS cantilever devices using photoresponsive polymers

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dc.contributor.authorJackson, Nathan
dc.contributor.authorKumar, Kamlesh
dc.contributor.authorOlszewski, Oskar Zbigniew
dc.contributor.authorSchenning, Albertus P. H. J.
dc.contributor.authorDebije, Michael G.
dc.contributor.funderSeventh Framework Programmeen
dc.date.accessioned2020-03-11T09:54:09Z
dc.date.available2020-03-11T09:54:09Z
dc.date.issued2019-06-29
dc.date.updated2020-03-11T09:46:51Z
dc.description.abstractMicroelectromechanical systems (MEMS) energy harvesting devices have had limited commercial success partly due to the frequency mismatch between the device and the vibration source. Tuning the cantilever device is one possible solution but developing a tunable MEMS device is difficult. This paper demonstrates a novel method of tuning a MEMS cantilever device post-fabrication by using light-responsive azobenzene liquid crystal polymers (LCP). Light exposure causes the photoresponsive polymers to change their elastic modulus, thus affecting the resonant frequency of the device. The photoresponsive polymer was integrated with three different MEMS cantilever substrates including LCP, parylene, and silicon. The three cantilever beams all demonstrated changes in resonant frequency when exposed to UV light of 10.4%, 8.13%, and 4.86%, respectively. The change in resonant frequency is dependent on the stiffness of the substrate, the thickness of the azo-LCP, the intensity and duration of the light exposure, and the wavelength of the light. The results in this paper validate that light responsive polymers can be used to reduce the frequency of MEMS cantilevers post-fabrication, which could lead to developing devices that can be precisely tuned for specific applications.en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid85024en
dc.identifier.citationJackson, N., Kumar, K., Olszewski, O., Schenning, A. P. H. J. and Debije, M. G. (2019) 'Tuning MEMS cantilever devices using photoresponsive polymers', Smart Materials and Structures, 28(8), 085024, (9 pp). doi: 10.1088/1361-665x/aad013en
dc.identifier.doi10.1088/1361-665x/aad013en
dc.identifier.eissn1361-665X
dc.identifier.endpage9en
dc.identifier.issn0964-1726
dc.identifier.issued8en
dc.identifier.journaltitleSmart Materials and Structuresen
dc.identifier.startpage1en
dc.identifier.urihttps://hdl.handle.net/10468/9747
dc.identifier.volume28en
dc.language.isoenen
dc.publisherIOP Publishingen
dc.relation.projectinfo:eu-repo/grantAgreement/EC/FP7::SP1::NMP/604360/EU/MANpower - Energy Harvesting and Storage for Low Frequency Vibrations/MANPOWERen
dc.relation.urihttps://iopscience.iop.org/article/10.1088/1361-665X/aad013
dc.rights© 2019 IOP Publishing Ltd. This is an author-created, un-copyedited version of an article accepted for publication in Smart Materials and Structures. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1088/1361-665X/aad013. As the Version of Record of this article has been published on a subscription basis, this Accepted Manuscript will be available for reuse under a CC BY-NC-ND 3.0 licence after a 12 month embargo period.en
dc.rights.urihttps://creativecommons.org/licences/by-nc-nd/3.0en
dc.subjectFrequency tuningen
dc.subjectMEMSen
dc.subjectCantileveren
dc.subjectEnergy harvestingen
dc.subjectPhotoresponsive liquiden
dc.subjectCrystal polymeren
dc.titleTuning MEMS cantilever devices using photoresponsive polymersen
dc.typeArticle (peer-reviewed)en
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