Laser-machined substrate technology (LMST) for Q-band applications
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Date
2020-10-20
Authors
Fontana, Andrés
Perigaud, A.
Richard, P.
Carsenat, D.
Elmostadi, R.
Delhote, N.
Journal Title
Journal ISSN
Volume Title
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Published Version
Abstract
A three-steps laser micro-machined manufacturing technology (LMST) based in low-loss Alumina substrates is introduced and studied. As a consequence of this analysis, fabrication constraints are identified and design rules introduced in order to assist the conception of millimeter-wave passive devices for Q-band applications. Quality factor around 690 is measured at 42 GHz in resonators fabricated with this technology. Moreover, diverse devices are designed with the design rules proposed. Manufactured devices show good repeatability and balance between performance and size.
Description
Keywords
Laser micro-machined manufacturing technology (LMST) , Low-loss Alumina substrates
Citation
Fontana, A., Perigaud, A., Richard, P., Carsenat, D., Elmostadi, R. and Delhote, N. (2020) 'Laser-machined substrate technology (LMST) for Q-band applications', 2020 XXXIIIrd General Assembly and Scientific Symposium of the International Union of Radio Science, Rome, Italy, 29 August - 5 September 2020, pp. 1-4. https://doi.org/10.23919/URSIGASS49373.2020.9232179
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© 2020, IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.