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Development of CMOS-compatible electrostatic supercapacitors
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Date
2013
Authors
Burke, Micheal
Journal Title
Journal ISSN
Volume Title
Publisher
University College Cork
Published Version
Abstract
This work focuses on development of electrostatic supercapacitors (ESCs) using process routes compatible with complementary metal–oxide–semiconductor (CMOS) fabrication. Wafer-scale anodised aluminium oxide (AAO) processing techniques have been developed to produce high-surface area templates. Statistically optimised atomic layer deposition (ALD) processes have been developed to conformally coat the templates and generate metalinsulator-metal capacitor structures. Detailed electrical characterisation and analysis for a range of devices, revealed ESC’s with high capacitance densities of ~12 μF cm-2 and equivalent energy densities of 0.28 Wh/kg . Finally the suitability of ESC’s toward next generation energy storage applications is discussed.
Description
Keywords
ALD , Capacitor
Citation
Burke, M. 2013. Development of CMOS-compatible electrostatic supercapacitors. PhD Thesis, University College Cork.