Indefinite. Restriction lift date: 10000-01-01
Development of CMOS-compatible electrostatic supercapacitors
University College Cork
This work focuses on development of electrostatic supercapacitors (ESCs) using process routes compatible with complementary metal–oxide–semiconductor (CMOS) fabrication. Wafer-scale anodised aluminium oxide (AAO) processing techniques have been developed to produce high-surface area templates. Statistically optimised atomic layer deposition (ALD) processes have been developed to conformally coat the templates and generate metalinsulator-metal capacitor structures. Detailed electrical characterisation and analysis for a range of devices, revealed ESC’s with high capacitance densities of ~12 μF cm-2 and equivalent energy densities of 0.28 Wh/kg . Finally the suitability of ESC’s toward next generation energy storage applications is discussed.
ALD , Capacitor
Burke, M. 2013. Development of CMOS-compatible electrostatic supercapacitors. PhD Thesis, University College Cork.