Indefinite. Restriction lift date: 10000-01-01
Development of CMOS-compatible electrostatic supercapacitors
dc.check.date | 10000-01-01 | |
dc.check.embargoformat | E-thesis on CORA only | en |
dc.check.entireThesis | Entire Thesis Restricted | |
dc.check.info | Indefinite | en |
dc.check.opt-out | Not applicable | en |
dc.check.reason | This thesis is due for publication or the author is actively seeking to publish this material | en |
dc.contributor.advisor | Quinn, Aidan J. | en |
dc.contributor.advisor | Hurley, Paul K. | en |
dc.contributor.author | Burke, Micheal | |
dc.contributor.funder | Science Foundation Ireland | en |
dc.date.accessioned | 2014-01-21T12:03:07Z | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013 | |
dc.description.abstract | This work focuses on development of electrostatic supercapacitors (ESCs) using process routes compatible with complementary metal–oxide–semiconductor (CMOS) fabrication. Wafer-scale anodised aluminium oxide (AAO) processing techniques have been developed to produce high-surface area templates. Statistically optimised atomic layer deposition (ALD) processes have been developed to conformally coat the templates and generate metalinsulator-metal capacitor structures. Detailed electrical characterisation and analysis for a range of devices, revealed ESC’s with high capacitance densities of ~12 μF cm-2 and equivalent energy densities of 0.28 Wh/kg . Finally the suitability of ESC’s toward next generation energy storage applications is discussed. | en |
dc.description.sponsorship | Science Foundation Ireland (FORME) | en |
dc.description.status | Not peer reviewed | en |
dc.description.version | Accepted Version | |
dc.format.mimetype | application/pdf | en |
dc.identifier.citation | Burke, M. 2013. Development of CMOS-compatible electrostatic supercapacitors. PhD Thesis, University College Cork. | en |
dc.identifier.uri | https://hdl.handle.net/10468/1317 | |
dc.language.iso | en | en |
dc.publisher | University College Cork | en |
dc.rights | © 2013, Michael Burke. | en |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/ | en |
dc.subject | ALD | en |
dc.subject | Capacitor | en |
dc.subject.lcsh | Supercapacitors | en |
dc.thesis.opt-out | false | |
dc.title | Development of CMOS-compatible electrostatic supercapacitors | en |
dc.type | Doctoral thesis | en |
dc.type.qualificationlevel | Doctoral | en |
dc.type.qualificationname | PHD (Engineering) | en |
ucc.workflow.supervisor | paul.hurley@tyndall.ie |
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