Development of CMOS-compatible electrostatic supercapacitors

dc.check.date10000-01-01
dc.check.embargoformatE-thesis on CORA onlyen
dc.check.entireThesisEntire Thesis Restricted
dc.check.infoIndefiniteen
dc.check.opt-outNot applicableen
dc.check.reasonThis thesis is due for publication or the author is actively seeking to publish this materialen
dc.contributor.advisorQuinn, Aidan J.en
dc.contributor.advisorHurley, Paul K.en
dc.contributor.authorBurke, Micheal
dc.contributor.funderScience Foundation Irelanden
dc.date.accessioned2014-01-21T12:03:07Z
dc.date.issued2013
dc.date.submitted2013
dc.description.abstractThis work focuses on development of electrostatic supercapacitors (ESCs) using process routes compatible with complementary metal–oxide–semiconductor (CMOS) fabrication. Wafer-scale anodised aluminium oxide (AAO) processing techniques have been developed to produce high-surface area templates. Statistically optimised atomic layer deposition (ALD) processes have been developed to conformally coat the templates and generate metalinsulator-metal capacitor structures. Detailed electrical characterisation and analysis for a range of devices, revealed ESC’s with high capacitance densities of ~12 μF cm-2 and equivalent energy densities of 0.28 Wh/kg . Finally the suitability of ESC’s toward next generation energy storage applications is discussed.en
dc.description.sponsorshipScience Foundation Ireland (FORME)en
dc.description.statusNot peer revieweden
dc.description.versionAccepted Version
dc.format.mimetypeapplication/pdfen
dc.identifier.citationBurke, M. 2013. Development of CMOS-compatible electrostatic supercapacitors. PhD Thesis, University College Cork.en
dc.identifier.urihttps://hdl.handle.net/10468/1317
dc.language.isoenen
dc.publisherUniversity College Corken
dc.rights© 2013, Michael Burke.en
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/3.0/en
dc.subjectALDen
dc.subjectCapacitoren
dc.subject.lcshSupercapacitorsen
dc.thesis.opt-outfalse
dc.titleDevelopment of CMOS-compatible electrostatic supercapacitorsen
dc.typeDoctoral thesisen
dc.type.qualificationlevelDoctoralen
dc.type.qualificationnamePHD (Engineering)en
ucc.workflow.supervisorpaul.hurley@tyndall.ie
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