Fabrication of micro-thermoelectric devices for power generation and the thermal management of photonic devices

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dc.check.date2020-04-12
dc.check.infoAccess to this article is restricted until 12 months after publication by request of the publisher.en
dc.contributor.authorLal, Swatchith
dc.contributor.authorGautam, Devendraprakash
dc.contributor.authorRazeeb, Kafil M.
dc.contributor.funderHorizon 2020en
dc.contributor.funderScience Foundation Irelanden
dc.date.accessioned2019-04-17T11:33:32Z
dc.date.available2019-04-17T11:33:32Z
dc.date.issued2019-04-12
dc.date.updated2019-04-16T11:23:29Z
dc.description.abstractThis work demonstrates and discusses the fabrication of cross-plane configured micro thermoelectric devices for the power generation and thermal management of the photonic devices. The device is fabricated using a cost-effective electrodeposition technique on the silicon wafer with 210 pairs of the electrodeposited p-type BiTe and n-type CuTe pillars. The complete device is fabricated using the flip-chip bonding technique. Our focus in this work is on the challenges in the device fabrication and the solutions employed to overcome the obstacles thereby successfully fabricating the micro thermoelectric device.en
dc.description.sponsorshipHorizon 2020 (Research and Innovation Programme (grant agreement No. 825114 (SmartVista))en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLal, S., Gautam, D. and Razeeb, K. M. (2019) 'Fabrication of micro-thermoelectric devices for power generation and the thermal management of photonic devices', Journal of Micromechanics and Microengineering. doi: 10.1088/1361-6439/ab18f1en
dc.identifier.doi10.1088/1361-6439/ab18f1en
dc.identifier.eissn1361-6439
dc.identifier.issn1361-6439
dc.identifier.journaltitleJournal of Micromechanics and Microengineeringen
dc.identifier.urihttps://hdl.handle.net/10468/7779
dc.language.isoenen
dc.publisherIOP Publishingen
dc.relation.projectinfo:eu-repo/grantAgreement/EC/H2020::RIA/644453/EU/Thermally Integrated Smart Photonics Systems/TIPSen
dc.relation.projectinfo:eu-repo/grantAgreement/SFI/SFI Investigator Programme/15/IA/3160/IE/Thermoelectric efficiency of IV-VI and V2-VI3 materials driven near phase transitions/en
dc.relation.projectinfo:eu-repo/grantAgreement/SFI/SFI Research Centres/13/RC/2077/IE/CONNECT: The Centre for Future Networks & Communications/en
dc.relation.urihttp://iopscience.iop.org/10.1088/1361-6439/ab18f1
dc.rights© 2019, IOP Publishing Ltd. This Accepted Manuscript is available for reuse under a CC BY-NC-ND 3.0 licence.en
dc.rights.urihttps://creativecommons.org/licenses/by-nc-nd/3.0/en
dc.subjectElectrodepositionen
dc.subjectMicro-thermoelectric deviceen
dc.subjectMEMS fabricationen
dc.subjectEnergy-harvestingen
dc.titleFabrication of micro-thermoelectric devices for power generation and the thermal management of photonic devicesen
dc.typeArticle (peer-reviewed)en
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