Fabrication of micro-thermoelectric devices for power generation and the thermal management of photonic devices
dc.check.date | 2020-04-12 | |
dc.check.info | Access to this article is restricted until 12 months after publication by request of the publisher. | en |
dc.contributor.author | Lal, Swatchith | |
dc.contributor.author | Gautam, Devendraprakash | |
dc.contributor.author | Razeeb, Kafil M. | |
dc.contributor.funder | Horizon 2020 | en |
dc.contributor.funder | Science Foundation Ireland | en |
dc.date.accessioned | 2019-04-17T11:33:32Z | |
dc.date.available | 2019-04-17T11:33:32Z | |
dc.date.issued | 2019-04-12 | |
dc.date.updated | 2019-04-16T11:23:29Z | |
dc.description.abstract | This work demonstrates and discusses the fabrication of cross-plane configured micro thermoelectric devices for the power generation and thermal management of the photonic devices. The device is fabricated using a cost-effective electrodeposition technique on the silicon wafer with 210 pairs of the electrodeposited p-type BiTe and n-type CuTe pillars. The complete device is fabricated using the flip-chip bonding technique. Our focus in this work is on the challenges in the device fabrication and the solutions employed to overcome the obstacles thereby successfully fabricating the micro thermoelectric device. | en |
dc.description.sponsorship | Horizon 2020 (Research and Innovation Programme (grant agreement No. 825114 (SmartVista)) | en |
dc.description.status | Peer reviewed | en |
dc.description.version | Accepted Version | en |
dc.format.mimetype | application/pdf | en |
dc.identifier.citation | Lal, S., Gautam, D. and Razeeb, K. M. (2019) 'Fabrication of micro-thermoelectric devices for power generation and the thermal management of photonic devices', Journal of Micromechanics and Microengineering. doi: 10.1088/1361-6439/ab18f1 | en |
dc.identifier.doi | 10.1088/1361-6439/ab18f1 | en |
dc.identifier.eissn | 1361-6439 | |
dc.identifier.issn | 1361-6439 | |
dc.identifier.journaltitle | Journal of Micromechanics and Microengineering | en |
dc.identifier.uri | https://hdl.handle.net/10468/7779 | |
dc.language.iso | en | en |
dc.publisher | IOP Publishing | en |
dc.relation.project | info:eu-repo/grantAgreement/EC/H2020::RIA/644453/EU/Thermally Integrated Smart Photonics Systems/TIPS | en |
dc.relation.project | info:eu-repo/grantAgreement/SFI/SFI Investigator Programme/15/IA/3160/IE/Thermoelectric efficiency of IV-VI and V2-VI3 materials driven near phase transitions/ | en |
dc.relation.project | info:eu-repo/grantAgreement/SFI/SFI Research Centres/13/RC/2077/IE/CONNECT: The Centre for Future Networks & Communications/ | en |
dc.relation.uri | http://iopscience.iop.org/10.1088/1361-6439/ab18f1 | |
dc.rights | © 2019, IOP Publishing Ltd. This Accepted Manuscript is available for reuse under a CC BY-NC-ND 3.0 licence. | en |
dc.rights.uri | https://creativecommons.org/licenses/by-nc-nd/3.0/ | en |
dc.subject | Electrodeposition | en |
dc.subject | Micro-thermoelectric device | en |
dc.subject | MEMS fabrication | en |
dc.subject | Energy-harvesting | en |
dc.title | Fabrication of micro-thermoelectric devices for power generation and the thermal management of photonic devices | en |
dc.type | Article (peer-reviewed) | en |
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