Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy

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dc.contributor.authorRiza, Nabeel A.
dc.contributor.authorKhan, Sajjad A.
dc.contributor.authorSheikh, Mumtaz A.
dc.date.accessioned2020-06-02T11:37:07Z
dc.date.available2020-06-02T11:37:07Z
dc.date.issued2007-05-23
dc.description.abstractAn analog liquid crystal lens-based axial scanning confocal microscope is demonstrated as a 48 &mgr;m continuous range optical height measurement sensor used to characterize a 2.3 &mgr;m height Indium Phosphide twin square optical waveguide chip.en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleid65720Qen
dc.identifier.citationRiza, N. A., Khan, S. A. and and Sheikh, M. A. (2007) 'Noncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopy', Proceddings of SPIE, 6572, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications III, 65720Q, Defense and Security Symposium, 2007, Orlando, Florida, United States, 23 May. doi: 10.1117/12.717834en
dc.identifier.doi10.1117/12.717834en
dc.identifier.eissn1996-756X
dc.identifier.endpage4en
dc.identifier.issn0277-786X
dc.identifier.journaltitleProceedings of SPIEen
dc.identifier.startpage1en
dc.identifier.urihttps://hdl.handle.net/10468/10099
dc.identifier.volume6572en
dc.language.isoenen
dc.publisherSociety of Photo-Optical Instrumentation Engineers (SPIE)en
dc.rights© 2007 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.en
dc.subjectInstrumentation, measurement, and metrologyen
dc.subjectHeight measurementsen
dc.subjectLiquid crystalsen
dc.subjectConfocal microscopyen
dc.subjectScanning microscopyen
dc.subjectSensorsen
dc.subjectLiquid crystalsen
dc.subjectConfocal microscopyen
dc.subjectWaveguidesen
dc.subjectAnalog electronicsen
dc.subjectProfilingen
dc.subjectScanning electron microscopyen
dc.titleNoncontact no-moving parts surface height measurement sensor using liquid crystal-based axial scanning confocal optical microscopyen
dc.typeConference itemen
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