MORPHIC: MEMS enhanced silicon photonics for programmable photonics

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Khan, Muhammad Umar
Zand, Iman
Edinger, Pierre
Jo, Gaehun
Bleiker, Simon J.
Takabayashi, Alain Yuji
Antony, Cleitus
Jezzini, Moises
Talli, Giuseppe
Sattari, Hamed
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Society of Photo-optical Instrumentation Engineers, SPIE
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We present our work in the European project MORPHIC to extend an established silicon photonics platform with low-power and non-volatile micro-electromechanical (MEMS) actuators to demonstrate large-scale programmable photonic integrated circuits (PICs).
Silicon photonics , MEMS , Programmable photonics , Microelectromechanical systems , Photonics , Phase shifts , Waveguides , Photonic integrated circuits , Silicon
Khan, M.U., Zand, I., Edinger, P., Jo, G., Bleiker, S.J., Takabayashi, A.Y., Antony, C., Jezzini, M., Talli, G., Sattari, H., Lee, J.S., Malik, A.K., Verheyen, P., Kumar, S., Arce, C.L., Garcia, M., Jonuzi, T., Watte, J., Quack, N., Niklaus, F., Gylfason, K.B. and Bogaerts, W. (2022) ‘MORPHIC: MEMS enhanced silicon photonics for programmable photonics’, in R.G. Baets, P. O’Brien, and L. Vivien (eds) Integrated Photonics Platforms II. Strasbourg, France: SPIE Proceedings, Vol 121480, (10 pp).
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