Self calibrating wavelength multiplexed heterodyne interferometer for angstrom precision measurements
Loading...
Date
2005-05-24
Authors
Arain, Muzammil A.
Riza, Nabeel A.
Journal Title
Journal ISSN
Volume Title
Publisher
Society of Photo-optical Instrumentation Engineers (SPIE)
Published Version
Abstract
Measurement of refractive index, surface quality and temperature of the process materials in defense, petrochemical, power systems, glass, and metal industries is a fundamental need for precision systems performance. However, making these measurements in a super noisy defense or industrial environment is a big challenge faced by sensor technologies. Reported in this paper is the first ever demonstration of a wavelength multiplexed heterodyne interferometer using a single acousto-optic device (AOD). Heterodyne interferometry is pivotal in realizing a highly stable low noise interferometer. Inspite of the physical separation of the two arms of the interferometer, the sensor demonstrates Angstrom level optical path length sensitivity. The proposed sensor can be used in optical path length measurement-based sensing of parameters such as surface profile, refractive index, temperature, and pressure. Proof-of-concept experiment features a high resolution, low-loss, ultra compact, free space scanning interferometer implementation. Results include measurement of surface quality of a test mirror.
Description
Keywords
Acousto-optic devices , Heterodyne optical interferometers , Optical sensors , Scanning interferometers , Interferometers , Heterodyning , Signal detection , Multiplexing , Acousto-optics , Free space optics , Optical testing
Citation
Arain, M. A. and Riza, N. A. (2005) 'Self calibrating wavelength multiplexed heterodyne interferometer for angstrom precision measurements', Proceedings of SPIE, 5814, Enabling Photonics Technologies for Defense, Security, and Aerospace Applications, (24 May). Defense and Security, 2005, Orlando, Florida, United States. doi: 10.1117/12.604906
Link to publisher’s version
Copyright
© 2005 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.