Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation

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Duffy, Ray
Ricchio, Alessio
Murphy, Ruaidhrí
Maxwell, Graeme
Murphy, Richard
Piaszenski, Guido
Petkov, Nikolay
Hydes, Alan
O'Connell, Dan
Lyons, Colin
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The advent of high surface-to-volume ratio devices has necessitated a revised approach to parameter extraction and process evaluation in field-effect transistor technologies. In this work, active doping concentrations are extracted from the electrical analysis of Si nanowire devices with high surface-to-volume ratios. Nanowire resistance and Si resistivity are extracted, by first extracting and subtracting out the contact resistance. Resistivity (ρ) is selected as the benchmark parameter to compare different doping processes with each other. The impacts of nanowire diameter scaling to 10 nm and of nanowire spacing scaling to <20 nm are extracted for monolayer doping and beam-line ion implantation. Despite introducing significant crystal damage, P beam-line ion implantation beats allyldiphenylphosphine (ADP) P monolayer doping with a SiO2 cap in terms of lower Si resistivity and higher dopant activation, with dependencies on the nanowire width greater than on nanowire spacing. Limitations in ADP P monolayer doping with a SiO2 cap are due to the difficulties in dopant incorporation, as it is based on in-diffusion, and P atoms must overcome a potential barrier on the Si surface.
Electrical engineering , Condensed matter properties , Doping , Semiconductor devices , Condensed matter physics , Electronic transport , Electronic devices , Nanowires , General physics , Semiconductor device fabrication
Duffy, R., Ricchio, A., Murphy, R., Maxwell, G., Murphy, R., Piaszenski, G., Petkov, N., Hydes, A., O'Connell, D., Lyons, C., Kennedy, N., Sheehan, B., Schmidt, M., Crupi, F., Holmes, J. D., Hurley, P. K., Connolly, J., Hatem, C. and Long, B. (2018) 'Diagnosis of phosphorus monolayer doping in silicon based on nanowire electrical characterisation', Journal of Applied Physics, 123(12), 125701 (14pp). doi: 10.1063/1.5019470
© 2018, AIP Publishing. This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. The following article appeared in Journal of Applied Physics 123, 125701 (2018) and may be found at https://aip.scitation.org/doi/full/10.1063/1.5019470