Tuning MEMS cantilever devices using photoresponsive polymers

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dc.contributor.author Jackson, Nathan
dc.contributor.author Kumar, Kamlesh
dc.contributor.author Olszewski, Oskar Zbigniew
dc.contributor.author Schenning, Albertus P. H. J.
dc.contributor.author Debije, Michael G.
dc.date.accessioned 2020-03-11T09:54:09Z
dc.date.available 2020-03-11T09:54:09Z
dc.date.issued 2019-06-29
dc.identifier.citation Jackson, N., Kumar, K., Olszewski, O., Schenning, A. P. H. J. and Debije, M. G. (2019) 'Tuning MEMS cantilever devices using photoresponsive polymers', Smart Materials and Structures, 28(8), 085024, (9 pp). doi: 10.1088/1361-665x/aad013 en
dc.identifier.volume 28 en
dc.identifier.issued 8 en
dc.identifier.startpage 1 en
dc.identifier.endpage 9 en
dc.identifier.issn 0964-1726
dc.identifier.uri http://hdl.handle.net/10468/9747
dc.identifier.doi 10.1088/1361-665x/aad013 en
dc.description.abstract Microelectromechanical systems (MEMS) energy harvesting devices have had limited commercial success partly due to the frequency mismatch between the device and the vibration source. Tuning the cantilever device is one possible solution but developing a tunable MEMS device is difficult. This paper demonstrates a novel method of tuning a MEMS cantilever device post-fabrication by using light-responsive azobenzene liquid crystal polymers (LCP). Light exposure causes the photoresponsive polymers to change their elastic modulus, thus affecting the resonant frequency of the device. The photoresponsive polymer was integrated with three different MEMS cantilever substrates including LCP, parylene, and silicon. The three cantilever beams all demonstrated changes in resonant frequency when exposed to UV light of 10.4%, 8.13%, and 4.86%, respectively. The change in resonant frequency is dependent on the stiffness of the substrate, the thickness of the azo-LCP, the intensity and duration of the light exposure, and the wavelength of the light. The results in this paper validate that light responsive polymers can be used to reduce the frequency of MEMS cantilevers post-fabrication, which could lead to developing devices that can be precisely tuned for specific applications. en
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher IOP Publishing en
dc.relation.uri https://iopscience.iop.org/article/10.1088/1361-665X/aad013
dc.rights © 2019 IOP Publishing Ltd. This is an author-created, un-copyedited version of an article accepted for publication in Smart Materials and Structures. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1088/1361-665X/aad013. As the Version of Record of this article has been published on a subscription basis, this Accepted Manuscript will be available for reuse under a CC BY-NC-ND 3.0 licence after a 12 month embargo period. en
dc.rights.uri https://creativecommons.org/licences/by-nc-nd/3.0 en
dc.subject Frequency tuning en
dc.subject MEMS en
dc.subject Cantilever en
dc.subject Energy harvesting en
dc.subject Photoresponsive liquid en
dc.subject Crystal polymer en
dc.title Tuning MEMS cantilever devices using photoresponsive polymers en
dc.type Article (peer-reviewed) en
dc.internal.authorcontactother Zbigniew Olszewski, Tyndall Micronano Electronics, University College Cork, Cork, Ireland. +353-21-490-3000 Email: zbigniew.olszewski@tyndall.ie en
dc.internal.availability Full text available en
dc.date.updated 2020-03-11T09:46:51Z
dc.description.version Accepted Version en
dc.internal.rssid 505828020
dc.contributor.funder Seventh Framework Programme en
dc.description.status Peer reviewed en
dc.identifier.journaltitle Smart Materials and Structures en
dc.internal.copyrightchecked Yes
dc.internal.licenseacceptance Yes en
dc.internal.IRISemailaddress zbigniew.olszewski@tyndall.ie en
dc.identifier.articleid 85024 en
dc.relation.project info:eu-repo/grantAgreement/EC/FP7::SP1::NMP/604360/EU/MANpower - Energy Harvesting and Storage for Low Frequency Vibrations/MANPOWER en
dc.identifier.eissn 1361-665X


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© 2019 IOP Publishing Ltd. This is an author-created, un-copyedited version of an article accepted for publication in Smart Materials and Structures. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1088/1361-665X/aad013. As the Version of Record of this article has been published on a subscription basis, this Accepted Manuscript will be available for reuse under a CC BY-NC-ND 3.0 licence after a 12 month embargo period. Except where otherwise noted, this item's license is described as © 2019 IOP Publishing Ltd. This is an author-created, un-copyedited version of an article accepted for publication in Smart Materials and Structures. The publisher is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.1088/1361-665X/aad013. As the Version of Record of this article has been published on a subscription basis, this Accepted Manuscript will be available for reuse under a CC BY-NC-ND 3.0 licence after a 12 month embargo period.
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