Monolithic MEMS filter banks on RFSOI front-end module

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dc.contributor.authorCampanella, Humberto
dc.contributor.authorQian, You
dc.contributor.authorRomero, Christian O.
dc.contributor.authorGiner, Joan
dc.contributor.authorKumar, Rakesh
dc.date.accessioned2020-07-06T09:43:46Z
dc.date.available2020-07-06T09:43:46Z
dc.date.issued2020-01
dc.date.updated2020-07-06T09:29:06Z
dc.description.abstractThis work is the first demonstration of a monolithic multiband RF front-end module (RF-FEM), integrating MEMS Lamb-wave filters and switches on 200mm RF silicon-on-insulator (RFSOI) foundry technology. Multiple MEMS filters with photolithography-defined frequencies coexist with RF components in the same wafer. This technology enables vertical integration of RF-FEM components for more compact System-on-Chip (SoC) architectures. The resulting RF-FEMs will then integrate in the same process multi-frequency filter banks, low noise amplifiers (LNAs), and switches, with a footprint reduction up to 50% compared to system-in-package (SiP) modules. The SoC architecture also simplifies the design of interconnection lines and impedance matching networks.en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationCampanella, H., Qian, Y., Romero, C. O., Giner, J., Kumar, R. (2020) 'Monolithic MEMS filter banks on RFSOI front-end module', 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), Vancouver, BC, Canada, 18-22 January, pp. 218-221. doi: 10.1109/MEMS46641.2020.9056227en
dc.identifier.doi10.1109/MEMS46641.2020.9056227en
dc.identifier.eissn2160-1968
dc.identifier.endpage221en
dc.identifier.isbn978-1-7281-3581-6
dc.identifier.isbn978-1-7281-3580-9
dc.identifier.isbn978-1-7281-3582-3
dc.identifier.issn1084-6999
dc.identifier.startpage218en
dc.identifier.urihttps://hdl.handle.net/10468/10210
dc.language.isoenen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.urihttps://www.mems20.org/
dc.rights© 2020, IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en
dc.subjectChannel bank filtersen
dc.subjectLow noise amplifiersen
dc.subjectMicroswitchesen
dc.subjectMonolithic 3D integrationen
dc.subjectPhotolithographyen
dc.subjectRadiofrequency filtersen
dc.subjectSilicon-on-insulatoren
dc.subjectSystem-on-chipen
dc.subjectMultiple MEMS filtersen
dc.subjectMonolithic multiband RF front-end moduleen
dc.subjectRF silicon-on-insulator foundry technologyen
dc.subjectMEMS Lamb-wave filtersen
dc.subjectRFSOI front-end moduleen
dc.subjectRF-FEM componentsen
dc.subjectRF componentsen
dc.subjectMEMS filtersen
dc.subjectRF front-end modulesen
dc.subjectLamb wave filtersen
dc.subject5Gen
dc.titleMonolithic MEMS filter banks on RFSOI front-end moduleen
dc.typeConference itemen
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