Design and fabrication of a circular Digital Variable Optical Attenuator

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dc.contributor.authorSun, Winston
dc.contributor.authorMughal, M. Junaid
dc.contributor.authorPerez, Frank
dc.contributor.authorRiza, Nabeel A.
dc.contributor.authorNoell, Wilfried
dc.contributor.authorde Rooij, Nicolaas F.
dc.contributor.funderCroucher Foundationen
dc.date.accessioned2020-06-22T12:05:55Z
dc.date.available2020-06-22T12:05:55Z
dc.date.issued2004-08-16
dc.date.updated2020-06-22T09:43:02Z
dc.description.abstractThe second generation circular digital variable optical attenuator (CDVOA) with an effective area of 1500 μm diameter has been designed and fabricated based on SOI technology. C-band incoming Gaussian light can be reflected to an outgoing fiber from a shiny circular area, which is divided into sectors that can be individually tilted and addressed electrostatically to achieve variable light attenuation. Using a delay mask process, each movable component i) has an underlying ridge frame to maintain flatness, ii) is suspended by two micro beams at a bridge structure that connects to a handle where aluminum electrode is located underneath, and iii) is separated by wall structures at the handle area to reduce crosstalk from adjacent electrodes. Critical fabrication processes including the mirror and chip release are performed using a HF vapor phase etcher. Fluidic pressure and chip-dicing shocks are avoided. Initial results show that a mirror sector suspended by two 345 μm long beams with a cross-section of about 5×5 μm2 can be tilted to 2.8° at about 18 V driving voltage. Initial interferometric measurement gives estimated individual mirror flatness after metallic reflective coating to be about λ/15. The assembled chips are ready for further testing and characterization.en
dc.description.statusPeer revieweden
dc.description.versionPublished Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationSun, W., Mughal, M. J., Perez, F., Riza, N. A., Noell, W. and de Rooij, N. F. (2004) 'Design and fabrication of a circular Digital Variable Optical Attenuator' Photonics Europe Conf. on MEMS, MOEMS and Micromachinging, Proceedings of SPIE 5455, MEMS, MOEMS, and Micromachining, Photonics Europe, Strasbourg, France. doi: 10.1117/12.544997en
dc.identifier.doi10.1117/12.544997en
dc.identifier.eissn1996-756X
dc.identifier.endpage227en
dc.identifier.issn0277-786X
dc.identifier.journaltitleProceedings of SPIEen
dc.identifier.startpage220en
dc.identifier.urihttps://hdl.handle.net/10468/10155
dc.identifier.volume5455en
dc.language.isoenen
dc.publisherSociety of Photo-Optical Instrumentation Engineers (SPIE)en
dc.rights© 2004 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.en
dc.subjectMirrorsen
dc.subjectElectrodesen
dc.subjectSemiconducting wafersen
dc.subjectOxidesen
dc.subjectQuartzen
dc.subjectDeep reactive ion etchingen
dc.subjectSignal attenuationen
dc.titleDesign and fabrication of a circular Digital Variable Optical Attenuatoren
dc.typeConference itemen
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