Scalable nano-opto-electromechanical systems in silicon photonics

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dc.contributor.authorQuack, Niels
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorEdinger, Pierre
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorGeahun, Jo
dc.contributor.authorNiklaus, Frank
dc.contributor.authorVerheyen, Peter
dc.contributor.authorJezzini, Moises
dc.contributor.authorKhan, Umar
dc.contributor.authorZand, Iman
dc.contributor.authorBogaerts, Wim
dc.contributor.funderHorizon 2020en
dc.contributor.funderHasler Stiftungen
dc.contributor.funderSchweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschungen
dc.date.accessioned2023-03-10T13:41:39Z
dc.date.available2023-03-10T13:41:39Z
dc.date.issued2021-11-12
dc.description.abstractSilicon Photonics has over the past years rapidly evolved into a mature technology for photonic integrated circuits (PICs). Active research and development is pursued to further enhance current PIC technology, and the advances in technology have fueled a steadily increasing number of integrated photonic components on an individual PIC, giving rise to large and complex circuits with tens of thousands of individual building blocks [1]. While the availability of such high density photonic integration allows to tackle entirely new concepts such as programmable photonics [2], the increase in complexity poses at the same time tight constraints on the requirements for power consumption, footprint and optical performance of the individual building blocks. Recent analysis has shown, that among the physical effects available to interact with the photonic signals on-chip for device tuning, optical switching, or even modulation, are mechanically movable waveguides [3]. Such Nano-Opto-Electromechanical Systems (NOEMS) make use of established Micro-Electro-Mechanical Systems (MEMS) technology, giving birth to the emerging technology basis of Silicon Photonic MEMS.en
dc.description.sponsorshipHasler Stiftung (Grant No. 17008); Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung (Grant No. 183717)en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationQuack, N., Takabayashi, A. Y., Sattari, H., Edinger, P., Gylfason, K. B., Jo, G., Niklaus, F., Verheyen, P., Jezzini, M., Khan, U., Zand, I., Bogaerts, W. (2021) ‘Scalable nano-opto-electromechanical systems in silicon photonics’, 2021 IEEE Photonics Conference (IPC), Vancouver, BC, Canada, 18-21 October, pp. 1-2, doi: 10.1109/IPC48725.2021.9593009en
dc.identifier.doi10.1109/IPC48725.2021.9593009en
dc.identifier.endpage2en
dc.identifier.isbn978-1-6654-4676-1
dc.identifier.isbn978-1-6654-1601-6
dc.identifier.issn2575-274X
dc.identifier.issn2374-0140
dc.identifier.startpage1en
dc.identifier.urihttps://hdl.handle.net/10468/14303
dc.language.isoenen
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)en
dc.relation.projectinfo:eu-repo/grantAgreement/EC/H2020::RIA/780283/EU/Mems-based zerO-power Reconfigurable PHotonic ICs/MORPHICen
dc.rights© 2021, IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en
dc.subjectPhotonic MEMSen
dc.subjectNOEMSen
dc.subjectSilicon Photonicsen
dc.subjectPhotonic Integrated Circuitsen
dc.titleScalable nano-opto-electromechanical systems in silicon photonicsen
dc.typeConference itemen
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