Failure analysis of large area pt/hfo 2 /pt capacitors using multilayer perceptrons

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dc.contributor.authorMuñoz-Gorriz, J.
dc.contributor.authorMonaghan, Scott
dc.contributor.authorCherkaoui, Karim
dc.contributor.authorSuñé, Jordi
dc.contributor.authorHurley, Paul K.
dc.contributor.authorMiranda, Enrique
dc.contributor.funderScience Foundation Irelanden
dc.contributor.funderMinisterio de Ciencia, Innovación y Universidadesen
dc.date.accessioned2023-01-25T14:58:21Z
dc.date.available2023-01-25T14:58:21Z
dc.date.issued2021-10
dc.date.updated2023-01-24T18:35:56Z
dc.description.abstractIn this work, we investigated the spatial distribution of failure sites in large area Pt/HfO 2 /Pt capacitors using simple neural networks as classifiers. When an oxide breakdown (BD) occurs due to severe electrical stress, a mark shows up in the top metal electrode at the location where the failure event took place. The mark is the result of a microexplosion occurring inside the dielectric film. Large area devices need to be studied because the number of generated spots must be the required for statistical analysis. The obtained results using multilayer perceptrons with different number of neurons and hidden layers indicate that the largest breakdown spots tend to concentrate towards the center of the device. This observation is consistent with previous exploratory analysis carried out using spatial statistics techniques. This exercise shows the suitability of multilayer perceptrons for investigating the distribution of failure sites or defects on a given surface.en
dc.description.sponsorshipMinisterio de Ciencia, Innovación y Universidades (Spanish Ministry of Science, Innovation and Universities and the FEDER program through project TEC2017-84321-C4-4-R); Science Foundation Ireland (SFI through the AMBER 2 project (12/RC/2278-P2))en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleidA1.7 (ID 94)en
dc.identifier.citationMunoz-Gorriz, J., Monaghan, S., Cherkaoui, K., Sune, J., Hurley, P.K. and Miranda, E. (2021) ‘Failure analysis of large area pt/hfo 2 /pt capacitors using multilayer perceptrons’, in 2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Singapore, pp. 1–5. doi: 10.1109/IPFA53173.2021.9617281en
dc.identifier.doi10.1109/IPFA53173.2021.9617281en
dc.identifier.endpage5en
dc.identifier.isbn978-1-6654-3988-6
dc.identifier.issn1946-1550
dc.identifier.startpage1en
dc.identifier.urihttps://hdl.handle.net/10468/14129
dc.language.isoenen
dc.publisherIEEEen
dc.relation.ispartof2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA),
dc.relation.projectinfo:eu-repo/grantAgreement/SFI/SFI Research Centres/12/RC/2278/IE/Advanced Materials and BioEngineering Research Centre (AMBER)/en
dc.relation.urihttps://ieeexplore.ieee.org/document/9617281
dc.rights© 2022 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en
dc.subjectNeural networksen
dc.subjectPerceptronen
dc.subjectSpatial statisticsen
dc.subjectMIMen
dc.subjectDielectric breakdownen
dc.subjectReliabilityen
dc.titleFailure analysis of large area pt/hfo 2 /pt capacitors using multilayer perceptronsen
dc.typeConference itemen
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