High-throughput testing of the nanophotonic devices
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Accepted Version
Date
2023
Authors
Ananthachar, Adarsh
Devarapu, Ganga Chinna Rao
O’Faolain, Liam
Journal Title
Journal ISSN
Volume Title
Publisher
Optica Publishing Group
Published Version
Abstract
The proposed Resonance Scattering Spectroscopy (RSS) technique is fully automated, non-invasive, and high throughput wafer scale characterization system. In the RSS technique, a laser broadband light source of fixed polarisation is tightly focused on the device under test. Light with a wavelength matching that of the device’s resonance wavelength is scattered into the orthogonal polarisation giving a signal that is characteristic of the resonator which can be rapidly acquired. Using this prototype, several Photonic Crystal L3 cavities have been studied and we achieved a Q-factor of the order of tens of thousands for an optimised L3 cavity, which compares well with the design and simulation results.
Description
Keywords
Resonance Scattering Spectroscopy , RSS , Wafer scale characterization system , Photonic Crystal L3 cavity , Q-factor
Citation
Ananthachar, A., Devarapu, G. C. R. and O’Faolain, L. (2023) 'High-throughput testing of the nanophotonic devices', CLEO: Applications and Technology 2023, San Jose, CA, United States, 7–12 May. Technical Digest Series (Optica Publishing Group, 2023), paper AW4K.2 (2pp). https://doi.org/10.1364/CLEO_AT.2023.AW4K.2
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Copyright
© 2023, the Authors. CLEO 2023 © Optica Publishing Group 2023.