High-throughput testing of the nanophotonic devices

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dc.contributor.authorAnanthachar, Adarshen
dc.contributor.authorDevarapu, Ganga Chinna Raoen
dc.contributor.authorO’Faolain, Liamen
dc.date.accessioned2023-12-15T11:49:42Z
dc.date.available2023-12-15T11:49:42Z
dc.date.issued2023en
dc.description.abstractThe proposed Resonance Scattering Spectroscopy (RSS) technique is fully automated, non-invasive, and high throughput wafer scale characterization system. In the RSS technique, a laser broadband light source of fixed polarisation is tightly focused on the device under test. Light with a wavelength matching that of the device’s resonance wavelength is scattered into the orthogonal polarisation giving a signal that is characteristic of the resonator which can be rapidly acquired. Using this prototype, several Photonic Crystal L3 cavities have been studied and we achieved a Q-factor of the order of tens of thousands for an optimised L3 cavity, which compares well with the design and simulation results.en
dc.description.statusPeer revieweden
dc.description.versionAccepted Versionen
dc.format.mimetypeapplication/pdfen
dc.identifier.articleidAW4K.2en
dc.identifier.citationAnanthachar, A., Devarapu, G. C. R. and O’Faolain, L. (2023) 'High-throughput testing of the nanophotonic devices', CLEO: Applications and Technology 2023, San Jose, CA, United States, 7–12 May. Technical Digest Series (Optica Publishing Group, 2023), paper AW4K.2 (2pp). https://doi.org/10.1364/CLEO_AT.2023.AW4K.2en
dc.identifier.doihttps://doi.org/10.1364/cleo_at.2023.aw4k.2en
dc.identifier.endpage2en
dc.identifier.isbn978-1-957171-25-8en
dc.identifier.startpage1en
dc.identifier.urihttps://hdl.handle.net/10468/15324
dc.language.isoenen
dc.publisherOptica Publishing Groupen
dc.relation.ispartofCLEO: Applications and Technology 2023, San Jose, CA, United States 7–12 May 2023. From the session Optical Material and Device Characterization (AW4K)en
dc.relation.ispartofseriesTechnical Digest Seriesen
dc.rights© 2023, the Authors. CLEO 2023 © Optica Publishing Group 2023.en
dc.subjectResonance Scattering Spectroscopyen
dc.subjectRSSen
dc.subjectWafer scale characterization systemen
dc.subjectPhotonic Crystal L3 cavityen
dc.subjectQ-factoren
dc.titleHigh-throughput testing of the nanophotonic devicesen
dc.typeConference itemen
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